Cheng Lab

Quantum Nanoelectronics

Asylum MFP-3D Infinity AFM

  • Stunning high performance for a versatile AFM
  • Workhorse for oxide device fabrication



Oxford TeslatronPT and KelvinoxJT

  • Provides ultra low temperature environment,down to less than 25 mK
  •  A superconducting magnet is integrated into the system that can provide magnetic field up to 14 T

Westbond Wire bonder


  • For making wire bonds from chip carrier to devices


Leiden cryogen-free dilution refrigerator

  • 10 mK base temperature, 1 mW cooling power @100 mK
  • Top-loading probe for quick sample change on automatic lift table
  • Integration of home-made scanning probe microscopes
  • 10 T superconducting magnet

UHV Pulsed Laser Deposition(PLD-18L)

  • < 5E-10 Torr Base Pressure
  • Laser Heating Element with sample heating temperature: 1200°C (in < E-3 torr) and 1000°C (in > E-3 torr) compatible to oxygen-rich and any atmospheric conditions
  • High pressure RHEED system (real-time epitaxy monitoring)
  • Deposit thin-film with extremely high quality and great repeatability










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